Parts 維修

各種閥件專業的維修服務，包括MKS、VAT、SMC(Throttle、Isolation、Gate)Valve等，
供應高優質的產品及全方位的技術。
1.控制器 / Power / Motor / Driver/Z軸螺桿/ Valve等 維修及新品販售
2.Formed Bellows /Welded Bellows/ ISO

MODULE, WAFER LIFT UPPER

原廠料號:810-95652

XP lift assembly PURCH SPEC,BOSCH WAFER LIFT,SWLL, PRO

原廠料號:0190-48210

MODULE , WAFER LIFT LOWER

原廠料號:810-95651

MODULE,WAFER LIFT LOWER

原廠料號:0190-38399

PURCH SPEC,BOSCH PIN LIFT,LOWER SWLL Repair

原廠料號:0190-47186

PURCH SPEC,BOSCH PIN LIFT,LOWER SWLL Repair

原廠料號:0190-25081

LIFT PIN ACTUATOR,300MM RADIANCE O/H

原廠料號:0190-11997

HT SWLT BELLOWS

原廠料號:0040-85643

WELDMENT , SWLL FORELINE , PRODUCER ACP

原廠料號:810-97231

WELDMENT , SWLL FORELINE , PRODUCER ACP

原廠料號:0050-90705

BELLOWS,SUS O/H

原廠料號:810-138106

CYL AIR 3.25 BORE 1.5STRK DBL ACT W/AUT

原廠料號:3020-01052

CYLINDER,FI/SWLL DOOR Repair

原廠料號:3020-00056

APPLIED FI Controller SPEC 5*FI ETHERNET DIGITAL I/O MKS MA

原廠料號:0190-22543

ELECTRICAL ASSY , INTEGRATED SIMPLIFIED C

原廠料號:0190-36787

VACUUM ROBOT controller

原廠料號:810-136397、0190-46858

MONITOR , ENDOINT NDIR

原廠料號:810-30593、0190-08344

Heater Driver

原廠料號:0190-12138

HTBESC Heater driver

原廠料號:0190-43083

DRIVER, SERVO AC (CR.X.CS)

原廠料號:810-29761

DRIVER,SERVO AC(V , BZ)

原廠料號:810-29763

DRIVER,SERVO AC(CZ , E , Z)

原廠料號:810-29760

DRIVER,SERVO AC(BY,CX)

原廠料號:810-29762

HEATER DRIVER SERVO

原廠料號:810-94507

LIFT MOTOR DRIVER

原廠料號:810-76752、0190-13840

DRVR SERVO MOTOR 100W, 200V DNET, SIGMA

原廠料號:0190-51414

DRIVER,LL SERVER AMPLIFIER 100W 200V

原廠料號:810-66487

Overhaul backout driver

原廠料號:0190-14927

PVD 208V DUAL SWLL LAMP DEGAS DRIVER

原廠料號:0190-12531

Robot NSK driver O/H

原廠料號:0910-28822

DRIVER STEP MOTOR,DEVICENTE POSITION CONT EOL

原廠料號:0870-00038

Panasonic DRIVER Repair

原廠料號:1A80-012454-11

TOP PLATE. FFU FAN BLOWER.5.3 FI APPLIED

原廠料號:0190-14527

FEEDTHRU ASSY FLOWTHRU COMMON SOUR

原廠料號:0190-40352

FEEDTHRU ASSY FLOWTHRU COMMON SOUR

原廠料號:0190-26506

XDCR PRESS 100 APPLIED MKS Gauge

原廠料號:1350-00681、1350-00255

GENERATOR , HF RF 3KW , ARC DETECT , ECAT , P

原廠料號:0190-51379

GENERATOR , HF RF 3KW , ARC DETECT EC -REP

原廠料號:0190-63138

MOTOR STEPPER 5 PHASE W/50:1 HARMONIC

原廠料號:1080-00188

VEXTA 5PHASE DRIVER ORIENTAL MOTOR

原廠料號:A6346-043-A4

MOTOR AC SERVO , 3-300R/MIN 3P 200-230VAC

原廠料號:1080-00310

DRVR SERVO MOTOR STEPPER 24VDC DNET

原廠料號:1080-00327、0040-63746

Lift motor (Panasonic AC SERVO MOTOR)

原廠料號:0190-13771

PCB , MAIN WITH CPU AD0-G1A 300MM

原廠料號:810-76909

PCB ASSY , RF FLITER HGB , PRODUCER SE

原廠料號:0100-02343

AIDO Board

PCB ASSY , RF FLITER HGB , PRODUCER SE

原廠料號:0100-02343

APPLIED ELECTROSTATIC CHUCK POWER SUPPLY

原廠料號:0190-40414

APPLIED ELECTROSTATIC CHUCK POWER SUPPLY

原廠料號:0190-14140

SHUTTER SENSOR

原廠料號:0190-10801

APPLIED ELECTROSTATIC CHUCK POWER SUPPLY

原廠料號:0190-34624

APPLIED ELECTROSTATIC CHUCK POWER SUPPLY

原廠料號:0190-36793

APPLIED POWER SUPPLY AC TO DC (550W)

原廠料號:0190-26767

PWRSP DC 15/15/24/24/24V modular APPLIED POWER SUPPLY AC TO DC (1000W)

原廠料號:1140-00394

ATM RBT,TYPE A,6.4FI

原廠料號:0190-64166

SHUTTER SENSOR

原廠料號:0190-10801

Cylinder O/H CDQ2B125TN-63Z-DCP0641P 300MM

原廠料號:3020-00611

O/H for 300mm Slit valve actuator

原廠料號:3020-00077

MANF SLIT VALVE PNEU 16-STATION Repair

原廠料號:4060-01102

UPS 5115 Power WARE Repair

原廠料號:0190-26019

MKS TWO STAGE INLINE NW40

原廠料號:0190-76185

MKS VALVE PNEU-ACT RTANG 1"OD NW25 TWO-STAGE

原廠料號:3870-06567

VALVE PNEU ACTD IN-LINE TYPE-NWB

原廠料號:3870-01331

VALVE,PNEU RED CUP N/C FK-50-REP

原廠料號:810-31827

VALVE,ISOLATION,ANGLE,NW40,1 STAGE

原廠料號:3870-06743

VALVE, SOFT PUMP ANGLE

原廠料號:810-71090、0190-25635

VALVE,HV ANGLE VALVE

原廠料號:3870-04912

VALVE,VAC N/C NW40 ISO-KF VITON SEAL BU

原廠料號:810-53320

VALVE,PNEU DIAPH N/C NW40 RTNG HIGH VAC

原廠料號:810-64305

VALVE,HI VAC INLINE

原廠料號:810-71093

VALVE,VAC N/C NW40 ISO-KF VITON SEAL BU

原廠料號:0010-78140

VALVE , SLIT VALVE ASSY S-INSRT

原廠料號:810-118393、0190-40489

VALVE,HV ANGLE

原廠料號:810-71092

VALVE,VAC N/C NW40 ISO-KF VITON SEAL BU

原廠料號:810-53320

Valve,SOFT PUMP ANGLE

原廠料號:810-1090、 0190-25635

DNET , KF50 F/W 1.07 HIGH SPD , KAIRZE 808

原廠料號:0190-19203

DISPLAY , LIQUID CRYSTAL ,UT3-TLN21-B

原廠料號:810-125955

MAIN OPERATION CONTROLLER (Front)

原廠料號:5UOT36490

HP 工業電腦 硬碟 / 硬體維修 / 軟體硬體升級

原廠料號:661384-001

VALVE Repair

各種閥件專業的維修服務，包括MKS、VAT、SMC(Throttle、Isolation、Gate)Valve等，
供應高優質的產品及全方位的技術。

Driver Repair

提供各種廠牌驅動器維修，其中包括、PANASONIC松下、MITSUBISHI三菱、OMRON歐姆龍、YASKAWA 安川、VEXTA東方....等等。

Motor Repair

提供各種廠牌馬達維修，其中包括PANASONIC松下、MITSUBISHI三菱、YASKAWA安川、VEXTA東方、LS....等等。

PCB Board Repair

各廠牌機板(PCB BOARD)專業維修，其中有DAIFUKU、NDC、NEC、Orbotech、AKT、DATEL、OLYMPUS、YUASA、HITACHI、COSEL、SQUARE…等

高低電壓電源供應器維修

各式高低電壓電源供應器維修

Controller Repair

提供各種廠牌Controller維修

Z軸螺桿維修